Inductor made of component carrier material comprising electrically conductive plate structures

ABSTRACT

An inductor component includes a plurality of stacked layer structures made of component carrier material with electrically conductive plate structures, and a plurality of electrically conductive interconnect structures connecting the electrically conductive plate structures to thereby form an inductance with multiple windings.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims the benefit of the filing date of the EuropeanPatent Application No. EP 16 206 372.1 filed 22 Dec. 2016, thedisclosure of which is hereby incorporated herein by reference.

TECHNICAL FIELD

Embodiments of the invention relate to an inductor component, acomponent carrier, a method of manufacturing an inductor component, anda method of manufacturing a component carrier.

TECHNOLOGICAL BACKGROUND

In the context of growing product functionalities of component carriersequipped with one or more components and increasing miniaturization ofsuch components as well as a rising number of components to be mountedon the component carriers such as printed circuit boards, increasinglymore powerful array-like components or packages having severalcomponents are being employed, which have a plurality of contacts orconnections, with ever smaller spacing between these contacts. Removalof heat generated by such components and the component carrier itselfduring operation becomes an increasing issue. At the same time, mountingdevices shall be mechanically robust so as to be operable even underharsh conditions.

It is known to integrate an inductor in a printed circuit board.However, conventional approaches suffer from high electrical losses.

SUMMARY

There may be a need to provide an inductor component for componentcarrier applications with low electrical losses.

According to embodiments of the invention, an inductor component, acomponent carrier, a method of manufacturing an inductor component, anda method of manufacturing a component carrier according to theindependent claims are provided.

According to an exemplary embodiment of the invention, an inductorcomponent is provided, wherein the inductor component comprises aplurality of stacked layer structures made of component carrier material(such as printed circuit board (PCB) material, for instance copper,resin and/or reinforcing particles, wherein the latter may be embodiedas prepreg and/or a glass fiber epoxy laminate commonly known as FR4)and comprising electrically conductive plate structures, and a pluralityof electrically conductive interconnect structures connecting theelectrically conductive plate structures to thereby form an inductancewith multiple windings.

According to another exemplary embodiment of the invention, a componentcarrier is provided which comprises a stack comprising at least oneelectrically conductive layer structure and/or at least one electricallyinsulating layer structure, and an inductor component having the abovementioned features embedded in or surface mounted on the stack.

According to another exemplary embodiment of the invention, a method ofmanufacturing an inductor component is provided, wherein the methodcomprises stacking a plurality of layer structures made of componentcarrier material and comprising electrically conductive platestructures, and connecting the electrically conductive plate structuresby a plurality of electrically conductive interconnect structures tothereby form an inductance with multiple windings.

According to still another exemplary embodiment of the invention, amethod of manufacturing a component carrier is provided, wherein themethod comprises interconnecting a stack of at least one electricallyconductive layer structure and at least one electrically insulatinglayer structure, and embedding an inductor component which is configuredaccording to the above-mentioned features and/or is manufactured by amethod having the above-mentioned features in the stack.

Overview of Embodiments

In the context of the present application, the term “component carrier”may particularly denote any support structure which is capable ofaccommodating one or more components thereon and/or therein forproviding mechanical support and/or electrical connectivity. In otherwords, a component carrier may be configured as a mechanical and/orelectronic carrier for components. In particular, a component carriermay be one of a printed circuit board, an organic interposer, and an IC(integrated circuit) substrate. A component carrier may also be a hybridboard combining different ones of the above mentioned types of componentcarriers.

In the context of the present application, the term “inductor component”may particularly denote a standalone electronic member which provides aninductance in the framework of an electronic application in which theinductor component is implemented. The inductor component may be formedon the basis of component carrier technology, in particular on the basisof printed circuit board (PCB) technology, and may be surface-mounted orembedded in a separately formed or in an integrally formed componentcarrier such as a PCB. However, the inductor component can also be usedin conjunction with non-component carrier applications.

In the context of the present application, the term “electricallyconductive plate structure” may particularly denote a massive (ratherthan tiny) electrically conductive plate element with a thickness higherthan conventional electrically conductive layers (such as thin copperfoils) used for printed circuit board technology. In particular, theelectrically conductive plate structures may have a thickness andrigidity which does not allow the electrically conductive platestructure to be easily folded, and in particular may allow bending ofthe electrically conductive plate structure only to a very limitedextent. For example, the electrically conductive plate structure may bemade on the basis of a metallic sheet or plate with a thickness of atleast 300 μm.

In the context of the present application, the term “winding” mayparticularly denote a loop structure (which may be similar to a helicalstructure with corners), wherein multiple of such loops may form acoil-type arrangement. However, due to the component carriermanufacturing technology (for instance involving lamination) of theinductor component and/or due to the used component carrier rawmaterials (for instance involving planar constituents such as plates andfoils), the windings of the quasi-coil structure may have edge-like orcorner-like portions rather than being limited to a composition ofmultiple interconnected purely circular structures.

According to an embodiment of the invention, an inductor component and acorresponding component carrier are provided which can be manufacturedin a simple way by using component carrier manufacturing processes.However, contrary to typical layer thicknesses of copper foils (forinstance in the range between few micrometers to few tens ofmicrometers) used for manufacturing conventional component carriers suchas printed circuit boards (PCB), exemplary embodiments of the inventionincrement significantly thicker electrically conductive plate structuresfor constituting an electrically conductive winding functioning as aninductance. By taking this measure, not only high inductance values anda high carrying current capability is enabled, but it is also madepossible that signals are propagating along the inductor structure withonly low electrical loss. Furthermore, such a low loss or low ohmictransport of electric signals along the windings of the inductorcomponent has the additional advantage that ohmic heat generated duringsuch a process may be kept low. Remaining small amounts of heatgenerated by ohmic losses nevertheless can be dissipated from aninterior of the inductor component to a periphery via the use ofelectrically insulating material having a sufficiently high thermalconductivity, as conventionally used component carrier materials. Forexample, materials such as prepreg or FR4 may be used for that purpose,as known from PCB technology. By using relatively thick (compared toordinary PCB copper foil thicknesses) and robust electrically conductiveplate structures rather than very thin metal foils for manufacturing theinductor component, an inductor component with high metal filling factormay be obtained which results in a high Q-factor and a robust but at thesame time compact design.

In the following, further exemplary embodiments of the inductorcomponent, the component carrier and the methods will be explained.

In an embodiment, an electronic component is provided which is composedof the inductor component and at least one further electronic element(which may be realized as two separate members or as one integralmember). For instance, a transformer component may be provided which iscomposed of two cooperating inductor components of the above describedtype which are connected to a common shared soft magnetic (for instanceferrite) core structure. Thus, the term “inductor component” does notexclude that such a component provides one or more further electronicfunction in addition to the provision of an inductance.

In an embodiment, the plurality of electrically conductive interconnectstructures comprise at least one of the group consisting of verticalinterconnect structures (which may be aligned perpendicular to theelectrically conductive plate structures), inclined interconnectstructures, and horizontal interconnect structures (which may be alignedparallel to the electrically conductive plate structures). For instance,such interconnect structures of one or more of the mentioned geometricorientations may connect portions of the electrically conductive platestructures above and beneath so as to complete formation of thewindings. Such an embodiment can be implemented for example when theelectrically conductive plate structures are coplanar electricallyconductive strips (compare for instance FIG. 2 to FIG. 8), but also whenthe electrically conductive plate structures are multi-layer structures(compare for instance FIG. 9 to FIG. 12).

In an embodiment, the inductance is formed as a coil structure withmultiple windings aligned along a common central axis (around which thewindings may be arranged) and defined by the interconnect structures andthe connected electrically conductive plate structures. The windings maycomprise edges (for instance may have a substantially rectangularcross-section) or may be continuously curved (for instance may have asubstantially circular cross-section). Arranging the windings along acommon central axis allows to obtain a compact configuration with a highinductance value.

In an embodiment, an electrically conductive material filling factor (inparticular copper filling factor) of the inductor component, defined asa ratio between a partial volume of electrically conductive material ofthe inductor component and a total volume of the inductor component(i.e. the partial volume of electrically conductive material plus thepartial volume of electrically insulating material of the inductorcomponent), is at least 50%, in particular is at least 80%, moreparticularly is at least 90%. This allows to obtain an inductor memberwith a low ohmic configuration and a high Q-factor. In this context, theterm Q-factor may denote a dimensionless parameter that describes howunder-damped an inductance-based oscillator or resonator is andcharacterizes a resonator's bandwidth relative to its center frequency.

In an embodiment, the electrically conductive plate structures have athickness of at least 200 μm, in particular of at least 400 μm. Thethickness may even by 1 mm or more. With such high thicknesses of theelectrically conductive plate structures, a transport of electricsignals with low ohmic loss and small amount of generated heat may becombined with a high inductance value.

In an embodiment, the interconnect structures comprise at least one ofthe group consisting of metal filled vias and metallic inlays. Thementioned vias may be manufactured by drilling holes in the stack oflayer structures (for instance by laser drilling or mechanical drilling)and subsequently filling the holes (which may later connect differentelectrically conductive plate structures at different layer levels) byfilling the holes with electrically conductive material (such ascopper), for instance by plating. The filling of the holes withelectrically conductive material may be accomplished fully or partially.It is for instance possible to cover the walls of a corresponding drillhole with a layer of an electrically conductive material (such as alining of copper). It is then optionally possible to fill the remainingvoid volume of the drill hole partially or completely with a metallicpaste (for instance a copper paste). In particular with deep drill holesthis procedure may be simpler and more reliable than a complete fillingof such holes with galvanic copper only. In contrast to this, theconfiguration of at least part of the interconnect structures frominlays may involve readily formed electrically conductive blocks (forinstance shaped like a post or a bar) which are inserted into holes ofthe stacked layer structures. In particular with the use of bulkyinlays, the ohmic resistance of the windings can be further reduced.Also the formation of sufficiently large via holes and their subsequentfilling with low ohmic material such as copper allows to keep theinductance high and the electric resistance sufficiently small.

In an embodiment, a space between the electrically conductive platestructures and the interconnect structures is filled at least partiallyby electrically insulating material. Such an electrically insulatingmaterial keeps the structures forming the windings reliably spaced,thereby preventing undesired electric paths or short-circuiting. At thesame time, such electrically insulating material contributes to themechanical stability of the formed inductor component and can be made ofa sufficiently thermally conductive material removing heat generatedduring propagation of the signals along the windings in use of theinductor component. For instance, the electrically insulating materialmay have a thermal conductivity of at least 0.5 W/mK, in particular ofat least 2 W/mK.

In an embodiment, the inductor component comprises a magnetic structure,in particular a magnetically soft structure (for instance a ferritestructure), in at least part of a space delimited by the electricallyconductive plate structures and the interconnect structures. Such aferrite structure or other magnetized or magnetizable structureincreasing the magnetic permeability may be integrated in the stackedlayer structures. This allows to increase the performance of theinductor component without significantly complicating the manufacturingprocedure. For instance, various layers may simply be stacked andinterconnected to one another by lamination, i.e. the application ofheat and/or pressure.

In an embodiment, the magnetic structure is configured as a planarlayer. This allows to obtain a flat compact inductor component with ahigh value of the magnetic permeability. For instance, the magneticstructure may be configured as one of the group consisting of a magneticinlay (which may be readily manufactured when inserted between theelectrically conductive plate structures) and printed magnetic paste(which may be printed at a desired position of the inductor component).

In an embodiment, at least one of the electrically conductive platestructures comprises a plurality of (in particular coplanar) separatestrips (see for instance FIG. 2 to FIG. 8). The coplanar strips of oneelectrically conductive plate structure may be aligned within one planeand may be arranged juxtaposed to one another without direct contact.These strips may be formed based on an electrically conductive platewith slits, wherein a connecting frame defining an outer perimeter ofsuch a plate may be removed from the remainder of the inductor componentunder manufacture after having interconnected (in particular laminated)the plurality of stacked layer structures. This approach combines asimple manufacturing process with a low ohmic inductor component.

In an embodiment, separate strips of two opposing electricallyconductive plate structures are pivoted relative to one another (inparticular within a plane of the respective electrically conductiveplate structure). In other words, a first electrically conductive platewith strips aligned along a first direction may be combined with aparallel second electrically conductive plate having strips alignedalong a second direction, wherein the second direction may enclose anangle, in particular an acute angle, with the first direction. Forexample, such an acute angle may be in a range between 5° and 40°, inparticular between 10° and 30°. Such a mutual pivoting of the strips(and corresponding slits spacing the strips) significantly simplifiesthe formation of interconnected (in particular quasi-helical) windings,since this only requires the connection of the mutually slanted stripsby interconnect structures.

In an embodiment, a width of the strips is larger than a width of a gapbetween adjacent strips. This design rule allows to obtain a compactconfiguration with a nevertheless low ohmic property and a high metalfilling factor.

In an embodiment, at least one of the electrically conductive platestructures comprises a multi-layer structure (in particularly one ormore multi-layer blocks) with an alternating sequence of a plurality ofelectrically conductive plate sections and electrically insulating layersections (compare FIG. 9 to FIG. 12). For instance, such a multi-layerstructure may be implemented as an alternative or substitute for arespective one of the above mentioned strips. It is also possible thatmultiple multi-layer structures are combined so as to form at least partof the windings. According to such an embodiment, an electricallyconductive plate structure can be formed based on a layer sequence ofalternating electrically conductive plates (or layers) and electricallyinsulating layers which may be separated into various longitudinal bars,which may be further separated into small multi-layer blocks. Also suchan embodiment allows to manufacture the constituents of the inductorcomponent with low effort and allows for a low ohmic configuration witha high copper content.

In an embodiment, different multi-layer structures are pivoted relativeto one another (so that the stacking direction of different multi-layerstructures to be connected may be different, enabling the formation ofbent or curved windings or portions thereof). Hence, this also allows toconstruct curved structures with the combination of multiple multi-layerstructures (at least some of which may have a non-cuboid shape).

In an embodiment, a thickness of each of the electrically conductiveplate sections of the multi-layer structure is larger than a thicknessof each of the electrically insulating layer sections. This allows toobtain a high metal filling factor, a low ohmic resistance and aninductor component with a high Q-factor while also ensuring properelectric isolation properties.

In an embodiment, a thickness ratio between a thickness of a respectiveone of the electrically conductive plate sections and a thickness of theelectrically insulating layer sections of the multi-layer structure isat least 2, in particular is at least 4, more particularly is at least7. For instance, a thickness of an electrically conductive plate sectionmay be in a range between 300 μm and 500 μm, whereas a thickness of anelectrically insulating layer section may be in a range between 30 μmand 100 μm. This ensures at the same time a reliable electric isolationwhile simultaneously obtaining a high metal filling factor.

In an embodiment, the component carrier material comprises or consistsof copper and resin with reinforcing fibers. Therefore, conventionalstandard processes known from PCB technology can be implemented formanufacturing the inductor component with low effort. Copper and resinwith reinforcing fibers are typical constituents of PCBs.

In an embodiment, at least one of the electrically conductive platestructures and the interconnect structures comprise at least one of thegroup consisting of copper, aluminum, nickel, silver, gold, palladium,and tungsten, any of the mentioned materials being optionally coatedwith supra-conductive material such as graphene. Although copper isusually preferred, other materials or coated versions thereof arepossible as well, in particular coated with supra-conductive materialsuch as graphene.

In an embodiment, electrically insulating material of the stacked layerstructures comprises at least one of the group consisting of resin, inparticular reinforced or non-reinforced resin, for instance epoxy resinor Bismaleimide-Triazine resin, FR-4, FR-5, cyanate ester, polyphenylenederivate, glass, prepreg material, polyimide, polyamide, liquid crystalpolymer, epoxy-based Build-Up Film, polytetrafluoroethylene, a ceramic,and a metal oxide. Reinforcing materials such as webs, fibers orspheres, for example made of glass (multilayer glass) may be used aswell. Although prepreg or FR4 are usually preferred, other materials maybe used as well. For high frequency applications, high-frequencymaterials such as polytetrafluoroethylene, liquid crystal polymer and/orcyanate ester resins may be implemented as an electrically insulatinglayer structure.

In an embodiment, a thickness of each of the electrically conductiveplate structures is larger than a thickness of electrically insulatingmaterial between the electrically conductive plate structures. Inparticular, a thickness ratio between a thickness of a respective one ofthe electrically conductive plate structures and a thickness of theelectrically insulating material may be at least 2, in particular atleast 4, more particularly at least 7. This ensures to obtain aparticularly low ohmic inductor component with a high Q-factor and acompact design.

In an embodiment, the inductor component comprises an electricallyconductive contact structure at an exterior surface of the inductorcomponent electrically contacting at least one of the interconnectstructures. In addition to the electrically conductive plate structuresand the interconnect structures, it is possible to arrange, at thesurface of the coil, an electrically conductive contact structure whichmay electrically contact the individual interconnect structures. Forinstance, the electrically conductive contact structure is configured asone of the group consisting of at least one metal inlay and a patternedgalvanic metal layer. Such an electrically conductive cover of the coilallows to additionally increase the copper filling factor.

In an embodiment, a stacking direction of the stack is parallel to astacking direction of the stacked layer structures (compare for instanceFIG. 2 to FIG. 8). In such a configuration, embedding of an inductorcomponent into the stack of electrically conductive layer structures andelectrically insulating layer structures of the component carrier may beaccomplished by a board-in-board architecture, in which a recess may beformed in the mentioned stack and the readily manufactured inductorcomponent is embedded. Alternatively, also a direct lamination of thementioned stack with an inductor component mounted thereon is possible.

In another embodiment, a stacking direction of the stack is differentfrom, in particular is perpendicular and/or slanted to, a stackingdirection of the stacked layer structures (compare for instance FIG. 9to FIG. 12). Such an embodiment is particularly advantageous with theabove described configuration of the multi-layer structures and mayresult from the above mentioned pivoting.

In an embodiment of the method of manufacturing an inductor component,at least one of the electrically conductive plate structures is formedby providing a plate with integrally connected strips, interconnectingthe plate with the other layer structures, and subsequently removingpart of the material of the plate to thereby separate the strips fromone another. By taking this measure, the two parallel plates withmutually pivoted or rotated strips can be simply interconnected bylamination with a dielectric material in between, and simplifiedhandling. Subsequently, a surrounding frame of the plates, which frametemporarily connects the various strips of each respective plate, can beremoved (for instance by punching, cutting, milling, laser processing,etc.) so that the strips of a respective plate are separated but remainwithin one and the same plane, thereby forming an electricallyconductive plate structure. Electrically connecting these strips withinterconnect structures then allows to complete a winding constitutingthe inductance, or to connect neighbored windings to form a coil.

In an embodiment of the method of manufacturing an inductor component,at least one of the electrically conductive plate structures is formedby forming (in particular by laminating) an interconnected body of aplurality of alternating electrically conductive plates and electricallyinsulating layers, and separating the body into a plurality ofmulti-layer structures. Such an interconnected body may be manufacturedwith very low effort as a semi-finished product used as a constituentfor manufacturing the inductor component. For manufacturingcorresponding multi-layer structures (such as blocks), it is sufficientto simply laminate an alternative sequence of copper plates or sheetsand dielectric layers together and to separate the obtained plate-likebody into multi-layer structures. These multi-layer structures can beused as constituents for (partially or completely) forming the windingsof the inductor component.

In an embodiment of the method of manufacturing a component carrier, themethod comprises providing the stack with a cavity and inserting theinductor component into the cavity. Such a cavity may be a blind hole incomponent carrier material (for instance formed using an embeddedrelease layer and cutting out a piece of the component carrier materialabove the release layer). Alternatively, the cavity may be a throughhole in component carrier material which can be temporarily closed by atemporary carrier (for instance a sticky tape, for example on a rigidplate or a flexible film). The temporary carrier may be removed from therest of the component carrier before completing its manufacture.

In an embodiment of the method of manufacturing a component carrier, themethod comprises interconnecting (in particular laminating) at least onefurther electrically insulating layer structure and/or at least onefurther electrically conductive layer structure with the stack and theinductor component embedded in the cavity. During such a laminationprocedure, which may be initiated by the supply of mechanical pressureand/or heat, at least partially uncured material (such as prepreg) maybe re-melted, then re-solidified and thereby cured. After such alamination, the inductor component is safely embedded within an interiorof the component carrier and may be kept in place by the now curedmaterial.

In an embodiment, the component carrier comprises a stack of at leastone electrically insulating layer structure and at least oneelectrically conductive layer structure. For example, the componentcarrier may be a laminate of the mentioned electrically insulating layerstructure(s) and electrically conductive layer structure(s), inparticular formed by applying mechanical pressure, if desired supportedby thermal energy. The mentioned stack may provide a plate-shapedcomponent carrier capable of providing a large mounting surface forfurther components and being nevertheless very thin and compact. Theterm “layer structure” may particularly denote a continuous layer, apatterned layer or a plurality of non-consecutive islands within acommon plane.

In an embodiment, the component carrier is shaped as a plate. Thiscontributes to the compact design, wherein the component carriernevertheless provides a large basis for mounting components thereon.Furthermore, in particular a naked die as example for an embeddedelectronic component, can be conveniently embedded, thanks to its smallthickness, into a thin plate such as a printed circuit board.

In an embodiment, the component carrier is configured as one of thegroup consisting of a printed circuit board, and a substrate (inparticular an IC substrate).

In the context of the present application, the term “printed circuitboard” (PCB) may particularly denote a component carrier (which may beplate-shaped (i.e. planar), three-dimensionally curved (for instancewhen manufactured using 3D printing) or which may have any other shape)which is formed by laminating several electrically conductive layerstructures with several electrically insulating layer structures, forinstance by applying pressure, if desired accompanied by the supply ofthermal energy. As preferred materials for PCB technology, theelectrically conductive layer structures are made of copper, whereas theelectrically insulating layer structures may comprise resin and/or glassfibers, so-called prepreg or FR4 material. The various electricallyconductive layer structures may be connected to one another in a desiredway by forming through-holes through the laminate, for instance by laserdrilling or mechanical drilling, and by filling them with electricallyconductive material (in particular copper), thereby forming vias asthrough-hole connections. Apart from one or more components which may beembedded in a printed circuit board, a printed circuit board is usuallyconfigured for accommodating one or more components on one or bothopposing surfaces of the plate-shaped printed circuit board. They may beconnected to the respective main surface by soldering. A dielectric partof a PCB may be composed of resin with reinforcing fibers (such as glassfibers).

In the context of the present application, the term “substrate” mayparticularly denote a small component carrier having substantially thesame size as a component (in particular an electronic component) to bemounted thereon. More specifically, a substrate can be understood as acarrier for electrical connections or electrical networks as well ascomponent carrier comparable to a printed circuit board (PCB), howeverwith a considerably higher density of laterally and/or verticallyarranged connections. Lateral connections are for example conductivepaths, whereas vertical connections may be for example drill holes.These lateral and/or vertical connections are arranged within thesubstrate and can be used to provide electrical and/or mechanicalconnections of housed components or unhoused components (such as baredies), particularly of IC chips, with a printed circuit board orintermediate printed circuit board. Thus, the term “substrate” alsoincludes “IC substrates”. A dielectric part of a substrate may becomposed of resin with reinforcing spheres (such as glass spheres).

In an embodiment, the at least one electrically insulating layerstructure comprises at least one of the group consisting of resin (suchas reinforced or non-reinforced resins, for instance epoxy resin orBismaleimide-Triazine resin, more specifically FR-4 or FR-5), cyanateester, polyphenylene derivate, glass (in particular glass fibers,multi-layer glass, glass-like materials), prepreg material, polyimide,polyamide, liquid crystal polymer (LCP), epoxy-based Build-Up Film,polytetrafluoroethylene (Teflon), a ceramic, and a metal oxide.Reinforcing materials such as webs, fibers or spheres, for example madeof glass (multilayer glass) may be used as well. Although prepreg or FR4are usually preferred, other materials may be used as well. For highfrequency applications, high-frequency materials such aspolytetrafluoroethylene, liquid crystal polymer and/or cyanate esterresins may be implemented in the component carrier as electricallyinsulating layer structure.

In an embodiment, the at least one electrically conductive layerstructure comprises at least one of the group consisting of copper,aluminum, nickel, silver, gold, palladium, and tungsten. Although copperis usually preferred, other materials or coated versions thereof arepossible as well, in particular coated with supra-conductive materialsuch as graphene.

It is possible to embed or surface mount at least one further componentin or on the component carrier. Such a further component mayfunctionally cooperate with the embedded or surface mounted inductorcomponent. For instance, such an additional component can be selectedfrom a group consisting of an electrically non-conductive inlay, anelectrically conductive inlay (such as a metal inlay, preferablycomprising copper or aluminum), a heat transfer unit (for example a heatpipe), a light guiding element (for example an optical waveguide or alight conductor connection), an electronic component, or combinationsthereof. For example, the component can be an active electroniccomponent, a passive electronic component, an electronic chip, a storagedevice (for instance a DRAM or another data memory), a filter, anintegrated circuit, a signal processing component, a power managementcomponent, an optoelectronic interface element, a voltage converter (forexample a DC/DC converter or an AC/DC converter), a cryptographiccomponent, a transmitter and/or receiver, an electromechanicaltransducer, a sensor, an actuator, a microelectromechanical system(MEMS), a microprocessor, a capacitor, a resistor, an inductance, abattery, a switch, a camera, an antenna, a logic chip, and an energyharvesting unit. However, other additional components may be embedded inthe component carrier. For example, a magnetic element can be used as acomponent. Such a magnetic element may be a permanent magnetic element(such as a ferromagnetic element, an antiferromagnetic element or aferrimagnetic element, for instance a ferrite core) or may be aparamagnetic element. However, the additional component may also be afurther component carrier, for example in a board-in-boardconfiguration. The additional component may be surface mounted on thecomponent carrier and/or may be embedded in an interior thereof.Moreover, also other components, in particular those which generate andemit electromagnetic radiation and/or are sensitive with regard toelectromagnetic radiation propagating from an environment, may be usedas component.

In an embodiment, the component carrier is a laminate-type componentcarrier. In such an embodiment, the component carrier is a compound ofmultiple layer structures which are stacked and connected together byapplying a pressing force, if desired accompanied by heat.

The aspects defined above and further aspects of the invention areapparent from the examples of embodiment to be described hereinafter andare explained with reference to these examples of embodiment.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a cross-sectional view of a component carrier with anembedded inductor component according to an exemplary embodiment of theinvention.

FIG. 2, FIG. 3, FIG. 4, FIG. 5, FIG. 6, FIG. 7 and FIG. 8 illustratedifferent cross-sectional views of structures obtained duringperformance of a method of manufacturing an inductor component accordingto another exemplary embodiment of the invention.

FIG. 9, FIG. 10, FIG. 11 and FIG. 12 illustrate differentcross-sectional views of structures obtained during performance of amethod of manufacturing an inductor component according to yet anotherexemplary embodiment of the invention.

DETAILED DESCRIPTION OF ILLUSTRATED EMBODIMENTS

Embodiments of the present invention are now described and illustratedin the accompanying drawings. The invention is not restricted to thedescribed or illustrated example embodiments.

The illustrations in the drawings are schematically presented. Indifferent drawings, similar or identical elements are provided with thesame reference signs.

Before, referring to the drawings, exemplary embodiments will bede-scribed in further detail, some basic considerations will besummarized based on which exemplary embodiments of the invention havebeen developed.

According to an exemplary embodiment of the invention, an embeddedinductor architecture making use of component carrier technology isprovided.

In order to obtain inductors or coil-like structures with a highQ-factor, it has turned out to be necessary to have an as high metallic(in particular copper) content as possible. In other words, a high metalfilling factor of a PCB-based inductor component is desired. As a resultof such a high metal filling factor, the ohmic resistance may be reducedand electric losses may be suppressed. Exemplary embodiments of theinvention allow to increase the copper filling factor due to theimplementation of thick (in particular non-foldable) electricallyconductive plate structures rather than thin copper foils patterned byetching technology.

According to an exemplary embodiment of the invention, such electricallyconductive plate structures may be provided as pre-formed copperelements which, as a result of their manufacturing process, can beprovided with a very high copper content and with a pronouncedthickness. Such electrically conductive plate structures may bepositioned relatively close to one another by lamination technology.

With the mentioned manufacturing architecture, the electricallyconductive structures in the plane of carrying electric current may beplaced very close to one another. This increases the copper fillingfactor of the inductor component. For example, a copper filling factorof at least 90%, in particular of at least 95% may be achieved. Thisincreases the coil quality Q of the inductor component. Upon formationof interconnect structures for connecting the mentioned electricallyconductive plate structures in a vertical or z-direction (and/orextending horizontally and/or slanted with regard to both the horizontaland the vertical direction), also the copper filling factor in verticaldirection can be rendered very high, in particular at least 90%, moreparticularly at least 95%.

Conventional thin copper foils of small thickness patterned by etchingrequire a very small thickness in order to be patternable by etching.Due to this limitation, the copper filling factor of such conventionalinductor structures is quite small, rendering electric losses high andthe Q-factor low. Exemplary embodiments of the invention overcome suchlimitations by making a paradigm shift in terms of PCB technology, i.e.implementing (for instance punched or laminated) electrically conductiveplate structures with high copper filling factor, low ohmic propertiesand high Q-factor. A further advantage of exemplary embodiments of theinvention is that, when copper inlays are implemented as interconnectstructures, no significant topology occurs, resulting in flat andcompact inductor components, which are consequently highly appropriatein terms of being embedded itself in a component carrier. The describedmanufacturing technology of exemplary embodiments of the invention iscompatible with very different inductor shapes, such as ring coils,longitudinal coils, double longitudinal coils, etc.

Conductive plate structures arranged in different layers may beaccomplished by copper filled bores. For example, these structures mayfor instance be vertically arranged copper filled bores or throughconnections for coupling various sections of two or more electricallyconductive plate structures arranged in different layers. The impact onthe manufactured coil is then low, since the distance over the core isusually larger than the bores through the thin intermediate layer(s). Itis however also possible to interconnect electrically conductive layerstructures by copper inlays, which additionally increases the metalfilling factor.

The manufactured coil can be equipped with a soft magnetic ormagnetizable structure such as a ferrite core. Such a core may beembodied as another inlay, may be embedded, or may even be printed by amagnetic paste. Such a soft magnetic material may be made of ferrite, orany other permanent magnetic material, etc. It is however alternativelyalso possible to configure the inductor component as air coil, i.e.without ferrite core. Copper layers or plate structures may be providedwith a thickness of for example 400 μm or more. In contrast to this, oneor more electrically insulating layers (for instance made of prepregmaterial) between the electrically conductive plate structures may havea smaller thickness than the electrically conductive plate structures,for instance may have a thickness of 50 μm or less. Thereby, the copperfilling factor may be rendered very high.

In a highly preferred exemplary embodiment, slitted copper sheets may beimplemented for forming the electrically conductive plate structures(see FIG. 2 to FIG. 8). By taking this measure, a coil with a very highcopper filling factor may be manufactured. In a correspondingembodiment, two slitted (more precisely multi-slitted) copper sheets areinterconnected with or without a ferrite layer in between. The slits maybe formed by a laser cutting procedure, so that the slits can berendered very small as compared to the remaining webs or strips betweenadjacent slits. This additionally increases the copper filling factor.After having interconnected the electrically conductive plate structureswith the optional ferrite layer in between and with optional dielectricmaterial in between, the obtained compound may be milled (or treatedwith another abrasive procedure) to separate the strips and remove thepreviously connecting frame. The connection between the upper and thelower coil layer (provided by the two electrically conductive platestructures) can be manufactured as copper filled bores or using copperinlays. Optionally it is possible to cover the surface of the coil witha galvanic copper layer (or any other electrically conductive contractstructure) in order to ensure the electric contacting of the horizontaland vertical copper inlays. This copper layer can be subsequently formedwith the coil design of the upper and lower conductive layers (i.e. twoelectrically conductive plate structures).

In another preferred embodiment (see FIG. 9 to FIG. 12), theelectrically conductive plate structures may be formed based on asemi-finished product embodied as a layer sequence of copper foils (forinstance having a thickness of 400 μm or more) and dielectric layers inbetween (for instance having a thickness of 50 μm or less). Such a layerstack, which may be interconnected by lamination, may be cut intoseparate bars or blocks (also denoted as laminar structures ormulti-layer sections or multi-layer blocks), which may be subsequentlycut to a desired length. As a result, coil elements with a high coppercontent are formed, which also provide a reliable electric isolation.The obtained multi-layer sections may be rotated by an appropriate angle(for instance 90°) and may then be embedded in component carriermaterial. Thereby, it is possible to obtain an inductor componentaccording to an exemplary embodiment of the invention. The multi-layersections may constitute the electrically conductive plate structures,optionally they may additionally also (partially or entirely) form theinterconnect structures.

Inductor components manufactured according to exemplary embodiments ofthe invention may be used in addition to one or more embedded and/orsurface mounted (for instance active and/or passive electronic)components in a component carrier. Inductor components according toexemplary embodiments of the invention furthermore allow the manufactureof transformers, voltage converters and other electronic members, inparticular for high voltage applications. This allows to obtain an evenhigher degree of integration.

FIG. 1 shows a cross-sectional view of a component carrier 120 with anembedded inductor component 100 according to an exemplary embodiment ofthe invention.

The component carrier 120, which is here embodied as a printed circuitboard (PCB) with embedded inductor component 100, comprises a stack of aplurality of electrically conductive layer structures 122 and aplurality of electrically insulating layer structures 124. In the shownembodiment, the electrically insulating layer structures 124 are layerscomprising resin and reinforcing fibers therein. More precisely, theexterior electrically insulating layer structures 124 may be made ofprepreg or FR4, i.e. may be made based on an epoxy resin filled withreinforcing for glass fibers. The vertically most central one of theselayers is cut so as to define a through hole, recess or cavity 199 inwhich the inductor component 100 is embedded. The vertically mostcentral one of the electrically insulating layer structures 124 is acore 151 of fully cured material, which may for instance be made of FR4material. The other electrically insulating layer structures 124 aresubstantially continuous layers through which vertical interconnectstructures (forming part of the electrically conductive layer structures122) are formed for electrically contacting the inductor component 100.In the shown embodiment, the electrically conductive layer structures122 comprise patterned copper foils, continuous copper foils andvertical interconnect structures embodied as copper filled vias.

As can be taken from FIG. 1, the inductor component 100 is embeddedwithin the described stack rather than being surface mounted on anexterior surface of the component carrier 120. Alternatively, it is alsopossible to surface mount the inductor component 100 on the componentcarrier 120.

In the shown embodiment, the inductor component 100 comprises itself afurther laminated stack, i.e. a plurality of stacked layer structures102 made of component carrier material. Such component carrier materialmay be material used for printed circuit boards (PCBs) or IC substratessuch as copper, epoxy resin and glass fibers.

In particular, the inductor component 100 shown in FIG. 1 comprises twoparallel and vertically spaced electrically conductive plate structures104 which are here configured as isolated sections of a previouslyintegral copper plate (see reference numeral 130 in FIG. 2) having athickness of 0.5 mm. Both electrically conductive plate structures 104are patterned so as to form a plurality of coplanar separate strips 112.In each of the electrically conductive plate structures 104, theplurality of parallel separate strips 112 are separated by electricallyinsulating material 108 to ensure reliable electric isolation betweenadjacent strips 112 (forming part of adjacent windings of the coil-likeinductance). A horizontal width, D, of the strips 112 is larger than awidth, d, of a horizontal gap 114 between adjacent strips 112 so that ahigh copper filling factor and therefore a high Q-factor is obtained.

Beyond this, FIG. 1 shows that the inductor component 100 comprises aplurality of (here inclined, alternatively vertical and/or horizontal)interconnect structures 106 electrically connecting or coupling theelectrically conductive plate structures 104 to thereby form windings ofthe coil. Although not shown in FIG. 1, the inductor component 100furthermore comprises a plurality of other interconnect structures 106connecting the electrically conductive plate structures 104 in anotherplane than the paper plane of FIG. 1 to thereby complete formation ofthe multiple interconnected windings, i.e. a coil-like structure. Theinterconnect structures 106 may be configured as metal filled viasand/or as metallic inlays. As can be taken from FIG. 1 as well, a spacebetween the electrically conductive plate structures 104 and theinterconnect structures 106 is filled by electrically insulatingmaterial 108 such as resin and reinforcing fibers.

As can be taken from FIG. 1, a (here vertical) stacking direction of thestack of layer structures 122, 124 is parallel to a (here also vertical)stacking direction of the stacked layer structures 102. This geometrysimplifies interconnection of the various elements of the componentcarrier 120 by lamination, i.e. the application of heat and/ormechanical pressure.

A recess in the core 151, which defines the cavity 199, is filled withthe inductor component 100 as described. The plurality of electricallyconductive layer structures 122 and electrically insulating layerstructures 124 may be laminated on both opposing main surfaces of thecore 151 with embedded inductor component 100. The lamination procedurefor manufacturing such a component carrier 120 with embedded inductorcomponent 100 may use initially at least partially uncured dielectricmaterial such as B-stage resin which may cross-link upon lamination. Theembedded architecture according to FIG. 1 results in a highly compactcomponent carrier 120 with embedded inductor component 100. During thedescribed lamination procedure, a gap of the cavity 199 between thestack and the inserted inductor component 100 may be filled withre-melted and subsequently re-solidified material of the electricallyinsulating layer structures 124. Additionally or alternatively, it isalso possible to fill any remaining gap of the cavity 199 between thestack and the inserted inductor component 100 with an additional fillingmedium, such as a liquid resin. This may be in particular advantageouswhen the resin material of the prepreg sheet(s) of the electricallyinsulating layer structure(s) 124 is not sufficient for completelyfilling the gap during lamination.

For manufacturing the component carrier 120 shown in FIG. 1, the core151 with its central through hole may be connected to a temporarycarrier such as a sticky tape (not shown). The inductor component 100may then be placed within a cavity 199 delimited by the through holeand, at the bottom thereof, by the sticky tape. One or more electricallyconductive layer structures 122 and one or more electrically insulatinglayer structures 124 may then be placed on an upper surface of the soobtained structure and may be interconnected by lamination, i.e. by theapplication of heat and pressure. Subsequently, the temporary carriermay be removed from that now sufficiently rigid structure. On the lowermain surface and/or at the upper main surface of the so obtainedstructure, it is possible to further attach one or more electricallyconductive layer structures 122 and one or more electrically insulatinglayer structures 124 and interconnect them by lamination. The verticalinterconnect structures 106 can be formed by laser drilling followed bya copper plating procedure.

According to FIG. 1, the inductance is formed as a coil structure withmultiple substantially rectangular windings aligned along a commoncentral axis (corresponding to a horizontal direction according to FIG.1 and indicated by a broken line 186 in FIG. 1) and defined by theinterconnect structures 106 and the connected electrically conductiveplate structures 104.

FIG. 2 to FIG. 8 illustrate different cross-sectional views ofstructures obtained during carrying out a method of manufacturing aninductor component 100 according to another exemplary embodiment of theinvention.

Referring to FIG. 2, two rigid plates 130 of copper are shown in a planview and are used as a basis for the further manufacturing procedure.The plates 130 may have a thickness of for example 400 μm such that theyare not foldable or easily bendable, but form rigid plates. In each ofthe plates 130, a plurality of coplanar separate strips 112 are formedby drilling, milling, or laser cutting etc., thereby forming a pluralityof through holes in the form of parallel slits 114. In the upper plate130 according to FIG. 2, the slits 114 are formed parallel to the sideedges of the upper plate 130. In the lower plate 130 according to FIG.2, the slits 114 and the strips 112 are formed slanted with regard tothe side edges of the lower plate 130. The plates 130 are arranged so asto form two opposing parallel electrically conductive plates 130 havingslits 114 being pivoted or rotated relative to one another by an angleα. The angle α may be an acute angle, in particular in a range between5° and 30°. This ensures that a tight array of windings is formed by thetwo plates 130 in cooperation with interconnects 106 connecting thestrips 112 of the plates 130 for forming quasi-helical windings of thecoil under manufacture. FIG. 2 hence shows the two plates 130 as asemi-finished product for manufacturing electrically conductive platestructures 104 for an inductor component 100.

Referring to FIG. 3, the plates 130 according to FIG. 2 are stacked withan electrically insulating material 108 in between. Thus, according toFIG. 3, a plurality of layer structures 102 made of component carriermaterial and comprising preforms of electrically conductive platestructures 104, i.e. the plates 130, are stacked. FIG. 3 shows a sideview of the plates 130 according to FIG. 2 being sandwiched with a thinelectrically insulating layer as electrically insulating material 108 inbetween. The electrically insulating material 108 may have asignificantly smaller thickness (for instance 50 μm) as compared to theplates 130.

Referring to FIG. 4, an alternative structure compared to FIG. 3 isshown which comprises additionally a planar layer-type soft magneticstructure 110 made of a magnetically soft material such as ferrite in aspace between the slitted plates 130. Thus, in contrast to FIG. 3showing an air coil configuration, FIG. 4 shows a side view of a ferritecoil configuration with the soft magnetic structure 110 in between. Forexample, the magnetic structure 110 is configured as a magnetic inlay ora printed magnetic paste.

Referring to FIG. 5, a plan view of the structure shown in FIG. 3 oralternatively in FIG. 4 is illustrated. It can be taken from FIG. 5 howthe electrically conductive plate structures 104 are formed based on therespective plates 130. More precisely and starting from FIG. 3 or FIG.4, the electrically conductive plate structures 104 are formed byproviding the respective plates 130 with the still integrally connectedstrips 112. After interconnection according to FIG. 3 or FIG. 4, part ofthe material of the plates 130 is subsequently removed to therebyseparate the strips 112 from one another in each of the plates 130. Forthis purpose, two parallel recesses 155 are milled in the plates 113.This material removal procedure may be carried out along a direction157. Thus, FIG. 5 shows a plan view of the structures of FIG. 3 or FIG.4 and shows how recesses 155 are formed in the plates 130 shown in FIG.2 by milling or the like. This separates the various strips 112 from oneanother.

FIG. 6 again shows a plan view of the structure of FIG. 5, whereincopper inlays are now formed as vertical interconnect structures 106.The separated or isolated strips 112 of the vertically spaced andrelatively turned electrically conductive plate structures 104 maythereby be connected by forming a plurality of the here verticalinterconnect structures 106 to form multiple windings of the inductorcoil. The interconnect structures 106 thus interconnect the strips 112of the two opposing electrically conductive plate structures 104,thereby forming windings of a coil providing the inductor structure 100under manufacture.

FIG. 7 shows, after a further processing step, a side view of thestructure according to FIG. 6 in an embodiment of an air coil (compareFIG. 3). In contrast to this, FIG. 8 shows a side view of a structurecorresponding FIG. 6, after a further processing step, with a ferritecoil configuration (compare FIG. 4). As can be taken from FIG. 7, theinductor component 100 furthermore comprises an electrically conductivecontact structure 144 formed at an exterior surface of the inductorcomponent 100 electrically contacting the interconnect structures 106.This formation corresponds to the mentioned further processing step. Theelectrically conductive contact structure 144 may be configured as metalinlay or as patterned galvanic metal layer.

FIG. 9 to FIG. 12 illustrate different cross-sectional views ofstructures obtained during carrying out a method of manufacturing aninductor component 100 according to yet another exemplary embodiment ofthe invention.

Referring to FIG. 9, a preform of electrically conductive platestructures 104 are formed by laminating an interconnected body 132 of aplurality of alternating electrically conductive plates 134 (hereembodied as copper plates with a thickness of 400 μm) and electricallyinsulating layers 136 (here embodied as prepreg foils having a thicknessof 50 μm). Thereafter, the interconnected body 132 may be separated intoa plurality of parallel bars 138. A cutting wheel 159 cuts theinterconnected body 132 into the separate bars 138. FIG. 9 thereforeshows a laminar structure or layer sequence of electrically conductiveplates 134 and electrically insulating layers 136 interconnected bylamination, i.e. the application of pressure and/or heat.

FIG. 10 shows a single bar 138 which may be used as a constituent for aninductor coil (i.e. as electrically conductive plate structure 104 orinterconnect structure 106). The bar 138 can however also be furtherseparated into a plurality of multi-layer structures 140, which may alsobe denoted as multi-layer blocks. Thus, the bars 138 may be cut intosmaller pieces of appropriate size and shape, for instance cuboids, asshown in FIG. 11 and FIG. 12. The multi-layer structures 140 may also berotated prior to connecting them for the formation of a coil structure.Thus, the multi-layer structures 140 may be used as constituents of theelectrically conductive plate structures 104. They may also be used forinterconnect structures 106. However, electrically conductive platestructures 104 formed on the basis of multi-layer structures 140 mayalso combined with interconnect structures 106 formed on the basis ofmetal filled vias or inlays, as in FIG. 2 to FIG. 8.

Still referring to FIG. 11 and FIG. 12, each of the multi-layerstructures 140 is composed of an alternating sequence of a plurality ofelectrically conductive plate sections 134′ (as sections of theelectrically conductive plates 134) and electrically insulating layersections 136′ (as sections of the electrically insulating layers 136).Different multi-layer structures 140 may be pivoted relative to oneanother or may have a different shape (see FIG. 11). A thickness of eachof the electrically conductive plate sections 134′ is larger than athickness of each of the electrically insulating layer sections 136′. Byturning the multi-layer structures 140 by 90° (see FIG. 12) beforeassembling them to an inductor component 100, their stacking directionis rendered perpendicular to a stacking direction of a component carrier120 (see FIG. 1).

Different multi-layer structures 140 may differ from one anotherconcerning shape and/or size. More specifically, different multi-layerstructures 140 may be shaped and dimensioned so that abuttingmulti-layer structures 140 seamlessly fit to one another to thereby forman inductor component together. For instance, the multi-layer structures140 may comprise one or more cubes, one or more cuboids, one or moreparallelepipeds, and/or one or more three-dimensional bodies having sixplanar faces at least two opposing of which being not parallel to oneanother. Other shapes of the multi-layer structures 140 are possible aswell as long as they can be assembled to form an inductor component.

It should also be appreciated that the non-cuboid multi-layer structures140 shown on the right-hand side of FIG. 11 and FIG. 12 are onlyillustrated exemplarily and schematically. These slopingly cut blockscan also be further modified concerning the shape and/or size. They mayalso be grinded on one or more of their surfaces so as to fit tocorrespondingly connected cuboid multi-layer structures 140. Thus, thecorresponding illustration in FIG. 11 and FIG. 12 is simplified for thesake of simplicity.

It should be noted that the term “comprising” does not exclude otherelements or steps and the “a” or “an” does not exclude a plurality. Alsoelements described in association with different embodiments may becombined.

It should also be noted that reference signs in the claims shall not beconstrued as limiting the scope of the claims.

Implementation of embodiments of the invention is not limited to thepreferred embodiments shown in the figures and described above. Instead,a multiplicity of variants are possible which use the solutions shownand the principle according to embodiments the invention even in thecase of fundamentally different embodiments.

The invention claimed is:
 1. An inductor component, comprising: aplurality of stacked layer structures made of component carrier materialand electrically conductive plate structures; and a plurality ofelectrically conductive interconnect structures connecting theelectrically conductive plate structures to thereby form an inductancewith multiple windings, wherein at least one of the electricallyconductive plate structures comprises a multi-layer structure with analternating sequence of a plurality of electrically conductive platesections and electrically insulating layer sections, and wherein athickness of each of the electrically conductive plate sections islarger than a thickness of each of the electrically insulating layersections.
 2. The inductor component according to claim 1, furthercomprising at least one of the following features: wherein the pluralityof electrically conductive interconnect structures comprise at least oneof the group consisting of vertical interconnect structures, inclinedinterconnect structures, and horizontal interconnect structures; whereinthe inductance is formed as a coil structure with multiple windingsaligned along a common central axis and defined by the interconnectstructures and the connected electrically conductive plate structures;wherein an electrically conductive material filling factor of theinductor component, defined as a ratio between a partial volume ofelectrically conductive material of the inductor component and a totalvolume of the inductor component, is at least 50%; wherein theelectrically conductive plate structures have a thickness of at least200 μm; wherein the interconnect structures comprise at least one of thegroup consisting of metal filled vias, and metallic inlays; wherein aspace between the electrically conductive plate structures and theinterconnect structures is filled at least partially by electricallyinsulating material.
 3. The inductor component according to claim 1,further comprising: a magnetic structure in a space delimited by theelectrically conductive plate structures and the interconnectstructures.
 4. The inductor component according to claim 3, furthercomprising at least one of the following features: wherein the magneticstructure is configured as a planar layer; wherein the magneticstructure is configured as one of the group consisting of a magneticinlay and printed magnetic paste.
 5. The inductor component according toclaim 1, wherein at least one of the electrically conductive platestructures comprises a plurality of separate strips.
 6. The inductorcomponent according to claim 5, further comprising at least one of thefollowing features: wherein coplanar separate strips of two opposingelectrically conductive plate structures are positioned in parallelplanes; wherein separate strips of two opposing electrically conductiveplate structures are pivoted relative to one another; wherein a width ofthe strips is larger than a gap between adjacent strips of a respectiveone of the electrically conductive plate structures.
 7. The inductorcomponent according to claim 1, wherein different multi-layer structuresare pivoted relative to one another.
 8. The inductor component accordingto claim 1, further comprising at least one of the following features:wherein the component carrier material comprises or consists of copperand resin; wherein a thickness of each of the electrically conductiveplate structures is larger than a thickness of electrically insulatingmaterial between the electrically conductive plate structures; wherein athickness ratio between a thickness of a respective one of theelectrically conductive plate structures and a thickness of theelectrically insulating material is at least 2; an electricallyconductive contact structure at an exterior surface of the inductorcomponent electrically contacting at least one of the interconnectstructures, wherein the electrically conductive contact structure isconfigured as one of the group consisting of at least one metal inlayand a patterned galvanic metal layer.
 9. The inductor componentaccording to claim 1, wherein a thickness ratio between a thickness of arespective one of the electrically conductive plate sections and athickness of the electrically insulating layer sections is at least 2.10. The inductor component according to claim 1, wherein a thicknessratio between a thickness of a respective one of the electricallyconductive plate sections and a thickness of the electrically insulatinglayer sections is at least
 4. 11. A component carrier, configured as oneof the group consisting of a printed circuit board and a substrate, thecomponent carrier, comprising: a stack having at least one electricallyconductive layer structure and/or at least one electrically insulatinglayer structure; and an inductor component embedded in or surfacemounted on the stack, the inductor component having a plurality ofstacked layer structures made of component carrier material andelectrically conductive plate structures; and a plurality ofelectrically conductive interconnect structures connecting theelectrically conductive plate structures to thereby form an inductancewith multiple windings, wherein at least one of the electricallyconductive plate structures comprises a multi-layer structure with analternating sequence of a plurality of electrically conductive platesections and electrically insulating layer sections, and wherein athickness of each of the electrically conductive plate sections islarger than a thickness of each of the electrically insulating layersections.
 12. The component carrier according to claim 11, furthercomprising one of the following features: wherein a stacking directionof the stack is parallel to a stacking direction of the stacked layerstructures; wherein a stacking direction of the stack is different froma stacking direction of the stacked layer structures.
 13. The componentcarrier according to claim 11, wherein a stacking direction of the stackis perpendicular or slanted to a stacking direction of the stacked layerstructures.
 14. A method of manufacturing an inductor component, themethod comprising: stacking a plurality of layer structures made ofcomponent carrier material and electrically conductive plate structures;and connecting the electrically conductive plate structures by aplurality of electrically conductive interconnect structures to therebyform an inductance with multiple windings, wherein at least one of theelectrically conductive plate structures comprises a multi-layerstructure with an alternating sequence of a plurality of electricallyconductive plate sections and electrically insulating layer sections,and wherein a thickness of each of the electrically conductive platesections is larger than a thickness of each of the electricallyinsulating layer sections.
 15. The method according to claim 14, furthercomprising one of the following features: wherein at least one of theelectrically conductive plate structures is formed by providing a platewith integrally connected strips, interconnecting the plate with theother layer structures, and subsequently removing part of the materialof the plate to thereby separate the strips from one another; wherein atleast one of the electrically conductive plate structures is formed byforming an interconnected body of a plurality of alternatingelectrically conductive plates and electrically insulating layers,separating the body into a plurality of bars, and separating the barsinto a plurality of multi-layer structures.